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Kalrez® 9600: the ideal solution for gas and plasma delivery systems in semiconductor industries

Authorized Distributor


In the highly technical world of semiconductor industries, sealing requirements in gas and plasma delivery systems demand state-of-the-art solutions.


Kalrez® 9600 is the ideal answer to these needs, offering an unparalleled level of performance. This high-performance perfluoroelastomer (FFKM), designed by DuPont™, is optimized for high-purity, high-temperature vacuum applications where gaskets must resist the aggression of fluorine radicals and plasma oxygen.


 

Exceptional Performance of Kalrez® 9600

Kalrez® 9600 is recognized for its superior performance in three key areas:


Gas and Plasma Resistance

  • Low Weight Loss: This material maintains its integrity even when exposed to extreme plasma conditions, minimizing mass loss.

  • Low Particle Generation: Minimizes particle generation, which is essential for maintaining purity in critical semiconductor systems.


Chemical Resistance

  • Excellent Chemical Resistance: Kalrez® 9600 exhibits remarkable resistance against aggressive chemicals such as ammonia, ozone and water vapor, ensuring long operating life of the seals.


Thermal Stability

  • Very Low Outgassing: At high temperatures, outgassing is virtually zero, maintaining system integrity.

  • Exceptional Thermal Stability: Capable of operating up to 315°C without compromising performance.

  • Exceptional Compression Resilience: Retains its shape and functionality even under continuous thermal stress.


Availability and Customizations

Kalrez® 9600 is available in different configurations to meet any specific need:


  • Standard and Custom O-Rings: Available in various sizes to suit a wide range of applications.

  • Custom Shapes and Profiles: Designed to meet specific customer needs, offering customized solutions for any sealing challenge.


 

Areas of Application

Kalrez® 9600 is particularly suitable for applications in:

  • Semiconductor Industry: Where purity and resistance to extreme conditions are critical.

  • Gas and Plasma Delivery Systems: Used in various advanced manufacturing processes.

  • Other Industrial Applications: Which require superior chemical and thermal resistance.


We are #AuthorizedDistributors in Italy

Varisco & Co. is proud to be an authorized distributor of Kalrez® products in Italy. Our partnership with DuPont™ allows us to offer our customers the highest quality sealing solutions, supported by dedicated and knowledgeable customer service.


 

Case Study: Improving Purity in Manufacturing Processes of #Semiconductors


A major semiconductor manufacturer faced significant challenges related to seal contamination in their plasma systems. Using standard gaskets, they found significant mass loss and high particle generation, compromising process purity.



After implementing Kalrez® 9600, the manufacturer noticed a dramatic reduction in seal weight loss and particle generation. This led to improved end-product quality and greater operational efficiency. The thermal and chemical resilience of Kalrez® 9600 ensured longer seal life, reducing the need for frequent replacement and maintenance.


Conclusion

#Kalrez9600 represents the ideal solution for sealing requirements in gas and plasma delivery systems, offering superior performance in terms of gas and plasma resistance, chemical resistance and thermal stability. As authorized distributors of Kalrez® in Italy, Varisco & Co. is ready to support your projects with high-quality products and excellent service.

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For more information, visit our website or contact our team of experts. We are here to help you find the perfect sealing solution for your needs.


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👉🏻 Write to us to learn more about Kalrez® 9600 and how it can improve your industrial applications! Download the pdf on Kalrez® 9600 here:




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