Temnest ESC are single piece constructions that eliminate the glue layers that cause early failure and an unpredictable dielectric constant. They are designed to fit the standard OEM, AMAT, LAM, SPTS and TEL cathode. The ceramic ESCs are Coulombic with a very dense Al2O3 layer with high electrical resistivity. This avoids problems of disconnection and adhesion due to changes in surface conditions, as seen in some Johnson-Rahbeck designs. The improved cooling design offers better temperature homogeneity and better control of the wafer edge, which is relevant for process performance. For anodised LAM spindles, a patented high-density MA coating significantly improves durability.
-New high quality ESC products for AMAT, LAM and TEL rooms
-Adaptable to standard OEM cathodes, using existing or BKM recipes
-The latest materials and improved design can be recycled and reused.
-Excellent process performance and service life reduce costs and waste
-We supply 100mm, 150mm, 200mm and 300m ESC products.
REQUEST A QUOTE
see also
